Pressure dependence of (Ti, Al)N film growth on inner walls...

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Thin Solid Films 2016 / 9

Pressure dependence of (Ti, Al)N film growth on inner walls of small holes in high-power impulse magnetron sputtering

Shimizu, Tetsuhide, Komiya, Hidetoshi, Teranishi, Yoshikazu, Morikawa, Kazuo, Nagasaka, Hiroshi, Yang, Ming
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.09.041
Date:
September, 2016
File:
PDF, 1.97 MB
english, 2016
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