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Annealing effects on the structural and electrical properties of sputtered tungsten thin films
Kaidatzis, Andreas, Psycharis, Vassilios, Mergia, Konstantina, Niarchos, DimitriosLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.10.027
Date:
October, 2016
File:
PDF, 1.01 MB
english, 2016