Annealing effects on the structural and electrical...

Annealing effects on the structural and electrical properties of sputtered tungsten thin films

Kaidatzis, Andreas, Psycharis, Vassilios, Mergia, Konstantina, Niarchos, Dimitrios
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.10.027
Date:
October, 2016
File:
PDF, 1.01 MB
english, 2016
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