Design Criteria for a Push-On Push-Off MEMS Bistable Device

Journal of Microelectromechanical Systems 2016 / 10 Vol. 25; Iss. 5

Design Criteria for a Push-On Push-Off MEMS Bistable Device

Huang, Hen-Wei, Lee, Fu-Wei, Yang, Yao-Joe Joseph
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Volume:
25
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2574874
Date:
October, 2016
File:
PDF, 2.16 MB
english, 2016
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