Kraftmikroskopie durch Einzelpunktantastung an...

Kraftmikroskopie durch Einzelpunktantastung an Strukturkanten

Hüser, Dorothee, Häßler-Grohne, Wolfgang, Katzer, Klaus-Dieter, Hunecken, Jens, Fuß, Hans-Achim, Bosse, Harald
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Volume:
79
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2012.0244
Date:
December, 2012
File:
PDF, 713 KB
german, 2012
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