Wafer FTIR - Measuring Interstitial Oxygen on as Cut and...

Energy Procedia 2016 / 08 Vol. 92

Wafer FTIR - Measuring Interstitial Oxygen on as Cut and Processed Silicon Wafers

Wolny, Franziska, Krause, Andreas, Oehlke, Alexander, Wagner, Matthias
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Volume:
92
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2016.07.076
Date:
August, 2016
File:
PDF, 264 KB
english, 2016
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