Ductile Mode Behavior of Silicon During Scribing by...

Procedia CIRP 2016 Vol. 45

Ductile Mode Behavior of Silicon During Scribing by Spherical Abrasive Particles

Kumar, Arkadeep, Kovalchenko, Andrii, Pogue, Vanessa, Pashchenko, Evgeniy, Melkote, Shreyes N.
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Volume:
45
Year:
2016
Language:
english
Journal:
Procedia CIRP
DOI:
10.1016/j.procir.2016.02.341
File:
PDF, 1.05 MB
english, 2016
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