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Thermal Budget Control for Rapid Thermal Processing Systems with Spike-Shaped Temperature Profile
Jeng, Jyh-Cheng, Lee, Bor-Chi, Su, An-Jhih, Yu, Cheng-ChingVolume:
43
Year:
2010
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20100705-3-be-2011.00089
File:
PDF, 772 KB
english, 2010