Catalytic effects of electrode material on the silicon...

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RSC Advances 2016

Catalytic effects of electrode material on the silicon tetrachloride hydrogenation in RF-arc-discharge

Vorotyntsev, Andrey Vladimirovich, Kornev, Roman, Petukhov, Anton, Razov, Evgeny, Mochalov, Leonid, Trubyanov, Maxim, Vorotyntsev, Vladimir
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Year:
2016
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C6RA21023F
File:
PDF, 1.83 MB
english, 2016
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