Nanoscale probing of the lateral homogeneity of donors...

Nanotechnology 2016 / 08 Vol. 27; Iss. 31

Nanoscale probing of the lateral homogeneity of donors concentration in nitridated SiO 2 /4H–SiC interfaces

Fiorenza, Patrick, Di Franco, Salvatore, Giannazzo, Filippo, Roccaforte, Fabrizio
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/31/315701
Date:
August, 2016
File:
PDF, 1.00 MB
english, 2016
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