Compact, planar, translational piezoelectric bimorph actuator with Archimedes’ spiral actuating tethers
Yang, Chenye, Liu, Sanwei, Xie, Xin, Livermore, CarolVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/12/124005
Date:
December, 2016
File:
PDF, 1.93 MB
english, 2016