![](/img/cover-not-exists.png)
Numerical and experimental study of near-field scanning optical lithography using nanoscale bowtie apertures with ultrasmall gap size
Ding, Li, Qin, Jin, Chen, Yang, Wang, LiangVolume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.15.3.031611
Date:
September, 2016
File:
PDF, 2.51 MB
english, 2016