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In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Mai, Alexander, Bunce, Christopher, Hübner, Rene, Pahner, Daniel, Dauderstädt, UlrikeVolume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.15.3.035502
Date:
September, 2016
File:
PDF, 5.97 MB
english, 2016