Some results on chemical etching of AT-cut quartz wafers in...

Journal of Materials Science 1982 / 05 Vol. 17; Iss. 5

Some results on chemical etching of AT-cut quartz wafers in ammonium bifluoride solutions

C. R. Tellier
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Volume:
17
Language:
english
Pages:
7
DOI:
10.1007/bf00752244
Date:
May, 1982
File:
PDF, 495 KB
english, 1982
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