Wafering of ultra-thin silicon substrates by MeV hydrogen...

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Physica status solidi 2016 / 07

Wafering of ultra-thin silicon substrates by MeV hydrogen implantation: effects of fluence and energy

Kuisseu, Pauline Sylvia Pokam, Pingault, Timothée, Ntsoenzok, Esidor, Regula, Gabrielle, Mazen, Frédéric, Sauldubois, Audrey, Andreazza, Caroline
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Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201600054
Date:
July, 2016
File:
PDF, 436 KB
english, 2016
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