Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2016 / 11 Vol. 387
Sputtering of carbon using hydrogen ion beams with energies of 60–800eV
Sidorov, Dmitry S., Chkhalo, Nikolay I., Mikhailenko, Mikhail S., Pestov, Alexey E., Polkovnikov, Vladimir N.Volume:
387
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.10.007
Date:
November, 2016
File:
PDF, 1002 KB
english, 2016