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[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Interconnect performance and scaling strategy at the 5 nm Node
Chen, James Hsueh-Chung, LiCausi, Nicholas, Ryan, E. Todd, Standaert, Theodorus E, Bonilla, GriseldaYear:
2016
Language:
english
DOI:
10.1109/IITC-AMC.2016.7507641
File:
PDF, 450 KB
english, 2016