[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Novel approaches to determine thermomechanical materials data in advanced interconnect stacks
Zschech, Ehrenfried, Gall, Martin, Clausner, Andre, Sander, Christoph, Sukharev, ValeriyYear:
2016
Language:
english
DOI:
10.1109/IITC-AMC.2016.7507691
File:
PDF, 397 KB
english, 2016