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[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Transforming the P4 process to enhance mechanical and fracture properties of ULKs
Isaacson, Scott G., Can Wang,, Lionti, Krystelle, Volksen, Willi, Magbitang, Teddie P., Dauskardt, Reinhold H., Dubois, GeraudYear:
2016
DOI:
10.1109/IITC-AMC.2016.7507714
File:
PDF, 686 KB
2016