[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Process metrology of cobalt damascene interconnects
Shalyt, Eugene, Palvov, Michael, Xiaodong Yan,, Danni Lin,Year:
2016
Language:
english
DOI:
10.1109/IITC-AMC.2016.7507726
File:
PDF, 560 KB
english, 2016