[IEEE 2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) - Lisbon, Portugal (2016.6.27-2016.6.30)] 2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) - Test structures for residual stress monitoring in the integrated CMOS-MEMS process development

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