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Growth features and spectroscopic structure investigations of nanoprofiled AlN films formed on misoriented GaAs substrates
Seredin, P. V., Goloshchapov, D. L., Lenshin, A. S., Lukin, A. N., Fedyukin, A. V., Arsentyev, I. N., Bondarev, A. D., Lubyanskiy, Y. V., Tarasov, I. S.Volume:
50
Language:
english
Journal:
Semiconductors
DOI:
10.1134/s1063782616090219
Date:
September, 2016
File:
PDF, 1.13 MB
english, 2016