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Structural Optimizations of Silicon Based NMOSFETs with a Sunken STI Pattern by Using a Robust Stress Simulation Methodology
Lee, Chang-Chun, Liu, Chuan-Hsi, Cheng, Hsien-Chie, Deng, Rong HaoVolume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.10226
Date:
March, 2015
File:
PDF, 773 KB
english, 2015