![](/img/cover-not-exists.png)
Three dimensional material removal model of laser-induced backside wet etching of sapphire substrate with CuSO4 solutions
Xie, Xiaozhu, Huang, Xiandong, Jiang, Wei, Wei, Xin, Hu, Wei, Ren, QingleiVolume:
89
Language:
english
Journal:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2016.09.031
Date:
March, 2017
File:
PDF, 1.76 MB
english, 2017