Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate
Bahette, E, Michaud, J F, Certon, D, Gross, D, Perroteau, M, Alquier, DVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/11/115023
Date:
November, 2016
File:
PDF, 1.54 MB
english, 2016