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Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology
Helfenstein, Patrick, Mohacsi, Istvan, Rajeev, Rajendran, Ekinci, YasinVolume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.3.034006
Date:
September, 2016
File:
PDF, 1.79 MB
english, 2016