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Solution-processed high- k oxide dielectric via deep ultraviolet and rapid thermal annealing for high-performance MoS 2 FETs
Yoo, Geonwook, Choi, Sol Lea, Yoo, Byungwook, Oh, Min SukLanguage:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201600619
Date:
September, 2016
File:
PDF, 1.26 MB
english, 2016