Laser-Assisted Focused He + Ion...

ACS Applied Materials & Interfaces 2016 / 10

Laser-Assisted Focused He + Ion Beam Induced Etching with and without XeF 2 Gas Assist

Stanford, Michael G., Mahady, Kyle, Lewis, Brett B., Fowlkes, Jason D., Tan, Shida, Livengood, Richard, Magel, Gregory A., Moore, Thomas M., Rack, Philip D.
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.6b09758
Date:
October, 2016
File:
PDF, 6.39 MB
english, 2016
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