A stand-alone compact EUV microscope based on gas-puff...

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Journal of Microscopy 2016 / 10

A stand-alone compact EUV microscope based on gas-puff target source

TORRISI, ALFIO, WACHULAK, PRZEMYSLAW, WĘGRZYŃSKI, ŁUKASZ, FOK, TOMASZ, BARTNIK, ANDRZEJ, PARKMAN, TOMÁŠ, VONDROVÁ, ŠÁRKA, TURŇOVÁ, JANA, JANKIEWICZ, BARTŁOMIEJ J., BARTOSEWICZ, BARTOSZ, FIEDOROWICZ, H
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Language:
english
Journal:
Journal of Microscopy
DOI:
10.1111/jmi.12494
Date:
October, 2016
File:
PDF, 832 KB
english, 2016
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