Heteroepitaxial growth of β-AlN films on sapphire (0001) in nitrogen atmospheres by pulse laser deposition
Yoshida, Tomohiro, Ueda, Yūtaro, Daio, Takeshi, Tominaga, Aki, Okajima, Toshihiro, Yoshitake, TsuyoshiVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.06FJ05
Date:
June, 2015
File:
PDF, 1.15 MB
english, 2015