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Microsystem Technologies 2016 / 10

Mechanical design of a novel MEMS resonant sensor for monitoring in-plane magnetic fields

Alvarado-Rosas, V. O., Herrera-May, A. L., Aguilera-Cortés, L. A.
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3174-y
Date:
October, 2016
File:
PDF, 1.78 MB
english, 2016
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