The effect of deposition processing on structural and...

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Journal of Luminescence 2016 / 10

The effect of deposition processing on structural and luminescent properties of a-SiOC:H thin films fabricated by RF-magnetron sputtering

Vasin, A.V., Rusavsky, A.V., Kysil, D.V., Prucnal, S., Piryatinsky, Yu.P., Starik, S.P., Nasieka, Iu., Strelchuk, V.V., Lysenko, V.S., Nazarov, A.N.
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Language:
english
Journal:
Journal of Luminescence
DOI:
10.1016/j.jlumin.2016.10.029
Date:
October, 2016
File:
PDF, 1.44 MB
english, 2016
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