[IEEE 2016 IEEE International Reliability Physics Symposium...

  • Main
  • [IEEE 2016 IEEE International...

[IEEE 2016 IEEE International Reliability Physics Symposium (IRPS) - Pasadena, CA, USA (2016.4.17-2016.4.21)] 2016 IEEE International Reliability Physics Symposium (IRPS) - NBTI in Replacement Metal Gate SiGe core FinFETs: Impact of Ge concentration, fin width, fin rotation and interface passivation by high pressure anneals

Franco, J., Kaczer, B., Chasin, A., Mertens, H., Ragnarsson, L.-A., Ritzenthaler, R., Mukhopadhyay, S., Arimura, H., Roussel, Ph. J., Bury, E., Horiguchi, N., Linten, D., Groeseneken, G., Thean, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2016
Language:
english
DOI:
10.1109/IRPS.2016.7574533
File:
PDF, 530 KB
english, 2016
Conversion to is in progress
Conversion to is failed