Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars
Wang, Yue-Cun, Tian, Lin, Liu, Fan, Qin, Yuan-Bin, Zheng, Gong, Wang, Jing-Tao, Ma, Evan, Shan, Zhi-WeiLanguage:
english
Journal:
Small
DOI:
10.1002/smll.201601753
Date:
October, 2016
File:
PDF, 1.48 MB
english, 2016