The effects of thermal nitridation on phosphorus diffusion...

Journal of Materials Science 2016 / 2 Vol. 51; Iss. 3

The effects of thermal nitridation on phosphorus diffusion in strained SiGe and SiGe:C

Lin, Yiheng, Yasuda, Hiroshi, Schiekofer, Manfred, Xia, Guangrui
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
51
Language:
english
Journal:
Journal of Materials Science
DOI:
10.1007/s10853-015-9475-1
Date:
February, 2016
File:
PDF, 1.89 MB
english, 2016
Conversion to is in progress
Conversion to is failed