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Epitaxial and textured TiN thin films grown on MgO(1 0 0) by reactive HiPIMS: the impact of charging on epitaxial to textured growth crossover
Shayestehaminzadeh, Seyedmohammad, Thorsteinsson, Einar B, Primetzhofer, Daniel, Magnus, Fridrik, Olafsson, SveinnVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/45/455301
Date:
November, 2016
File:
PDF, 3.14 MB
english, 2016