Fabrication of capacitive absolute pressure sensors by thin...

Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates

Belsito, Luca, Mancarella, Fulvio, Roncaglia, Alberto
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095018
Date:
September, 2016
File:
PDF, 2.20 MB
english, 2016
Conversion to is in progress
Conversion to is failed