A model-based approach for the calibration and traceability...

Surface Topography: Metrology and Properties 2016 / 04 Vol. 4; Iss. 2

A model-based approach for the calibration and traceability of the angle resolved scattering light sensor

Seewig, Jörg, Eifler, Matthias, Schneider, Frank, Kirsch, Benjamin, Aurich, Jan C
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Volume:
4
Language:
english
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/4/2/024010
Date:
April, 2016
File:
PDF, 1.35 MB
english, 2016
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