[IEEE 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Budapest, Hungary (2016.5.30-2016.6.2)] 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Shape optimization for high quality factor flexural mechanical resonators operated in air
Aoust, Guillaume, Levy, Raphael, Bourgeteau, Beatrice, Le Traon, OlivierYear:
2016
Language:
english
DOI:
10.1109/DTIP.2016.7514840
File:
PDF, 392 KB
english, 2016