[IEEE 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Budapest, Hungary (2016.5.30-2016.6.2)] 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Electrostriction as an integrated transduction method for organic MEMS
Nesser, H., Yuan, J., Colin, A., Poulin, P., Dufour, I., Debeda, H., Ayela, C.Year:
2016
Language:
english
DOI:
10.1109/DTIP.2016.7514889
File:
PDF, 852 KB
english, 2016