[IEEE 2016 39th International Spring Seminar on Electronics Technology (ISSE) - Pilsen, Czech Republic (2016.5.18-2016.5.22)] 2016 39th International Spring Seminar on Electronics Technology (ISSE) - Loss factor of Alumina and AlN thin films created by reactive magnetron sputtering
Pavel, Mach, Jana, KolarovaYear:
2016
Language:
english
DOI:
10.1109/ISSE.2016.7563224
File:
PDF, 655 KB
english, 2016