Junctionless Poly-Si Nanowire Transistors With...

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Junctionless Poly-Si Nanowire Transistors With Low-Temperature Trimming Process for Monolithic 3-D IC Application

Lin, Jer-Yi, Kuo, Po-Yi, Lin, Ko-Li, Chin, Chun-Chieh, Chao, Tien-Sheng
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Year:
2016
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2016.2615805
File:
PDF, 2.32 MB
english, 2016
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