Low Thermal Budget Ohmic Contact Formation by Laser Anneal

Materials Science Forum 2016 / 5 Vol. 858

Low Thermal Budget Ohmic Contact Formation by Laser Anneal

Mazzamuto, Fulvio, Halty, Sebastien, Tanimura, Hideaki, Mori, Yoshihiro
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Volume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.858.565
Date:
May, 2016
File:
PDF, 929 KB
english, 2016
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