Molybdenum Microheaters for MEMS based Gas Sensor...

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IEEE Sensors Journal 2016

Molybdenum Microheaters for MEMS based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization

LANGOJU, LAKSHMI RAJESWARA RAO, Singh, Monoj kumar, Subramaniam, Kiruba Mangalam, Jampana, Nagaraju, S, Asokan
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Year:
2016
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2016.2621179
File:
PDF, 6.06 MB
english, 2016
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