[IEEE 2016 International Conference on Optical MEMS and Nanophotonics (OMN) - Singapore, Singapore (2016.7.31-2016.8.4)] 2016 International Conference on Optical MEMS and Nanophotonics (OMN) - Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection
Michels, Thomas, Rangelow, Ivo W., Aksyuk, VladimirYear:
2016
Language:
english
DOI:
10.1109/OMN.2016.7565883
File:
PDF, 429 KB
english, 2016