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SPIE Proceedings [SPIE 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage - Changzhou, China (Sunday 10 April 2016)] 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage - Embedded NVM technology at BEOL for 14nm FinFET and beyond
Gan, Fuxi, Song, Zhitang, Chi, Min-hwaVolume:
9818
Year:
2016
Language:
english
DOI:
10.1117/12.2239936
File:
PDF, 702 KB
english, 2016