A Multistep DRIE Process for Complex Terahertz Waveguide Components
Jung-Kubiak, Cecile, Reck, Theodore J., Siles, Jose V., Lin, Robert, Lee, Choonsup, Gill, John, Cooper, Ken, Mehdi, Imran, Chattopadhyay, GoutamYear:
2016
Language:
english
Journal:
IEEE Transactions on Terahertz Science and Technology
DOI:
10.1109/tthz.2016.2593793
File:
PDF, 878 KB
english, 2016