Measurement Technology for Micro-Nanometer Devices || Dynamic Measurements at the Micro/Nanoscale
Zhang, Wendong, Chou, Xiujian, Shi, Tielin, Ma, Zongmin, Bao, Haifei, Chen, Jing, Chen, Liguo, Li, Dachao, Xue, ChenyangVolume:
10.1002/97
Year:
2016
Language:
english
DOI:
10.1002/9781118717974.ch3
File:
PDF, 1.94 MB
english, 2016