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Measurement Technology for Micro-Nanometer Devices || MEMS Online Measurements
Zhang, Wendong, Chou, Xiujian, Shi, Tielin, Ma, Zongmin, Bao, Haifei, Chen, Jing, Chen, Liguo, Li, Dachao, Xue, ChenyangVolume:
10.1002/97
Year:
2016
Language:
english
DOI:
10.1002/9781118717974.ch6
File:
PDF, 1.62 MB
english, 2016