Single-photon-multi-layer-interference lithography for high-aspect-ratio and three-dimensional SU-8 micro-/nanostructures
Ghosh, Siddharth, Ananthasuresh, G. K.Volume:
6
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep18428
Date:
January, 2016
File:
PDF, 1.56 MB
english, 2016