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Laplacian eigenmaps- and Bayesian clustering-based layout pattern sampling and its applications to hotspot detection and optical proximity correction
Matsunawa, Tetsuaki, Yu, Bei, Pan, David Z.Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.4.043504
Date:
October, 2016
File:
PDF, 1.30 MB
english, 2016